Eryürek M.Karadag Y.Anand S.Kilinç N.Kiraz A.2019-08-012019-08-0120159.78193E+121559-9450https://hdl.handle.net/11480/1952Brno University of Technology, Faculty of Electrical Engineering and Communication, Department of Theoretical and Experimental Electrical Engineering;Brno University of Technology, SIX - Research Centre of Sensor, Information and Communication System;Czech Technical University in Prague, Faculty of Biomedical Engineering (FBME), Department of Biomedical Technique;Czech Technical University in Prague, Faculty of Electrical Engineering (FEE), Department of EM Field;EMBS Chapter of the IEEE Czechoslovakia Section;et al.We report hydrogen and humidity sensor employing elastic polymer (SU-8) optical microresonators. The sensing mechanism relies on the optical whispering gallery mode (WGM) resonance shifts in the transmission spectra of these microresonators. WGMs are excited through SU-8 waveguides in which a tunable laser light is coupled from an optical fiber. Relative humidity between 0 and 65% is detected at room temperature. For hydrogen sensing, the microresonators are coated with a thin layer of palladium (Pd) metal layer to increase the sensing performance. Hydrogen gas is detected reversibly between 0.3 and 1.5%. Hydrogen gas concentrations higher than 1.5% result irreversible degradation of the devices because of a phase transition occurring in the Pd layer.eninfo:eu-repo/semantics/closedAccessConference Object2015-January8928952-s2.0-84947296790N/A