Eryurek, MustafaKaradag, YasinTasaltin, NevinKilinc, NecmettinKiraz, AlperKudryashov, AVPaxton, AHIlchenko, VSAschke, LWashio, K2019-08-012019-08-012015978-1-62841-433-20277-786Xhttps://dx.doi.org/10.1117/12.2078244https://hdl.handle.net/11480/4074Conference on Laser Resonators, Microresonators, and Beam Control XVII -- FEB 09-12, 2015 -- San Francisco, CAAn SU-8 polymer microdisk resonator coated with a palladium (Pd) layer and coupled to a single-mode optical waveguide is used to as a hydrogen (H-2) gas sensor. In the presence of H2 a red shift is observed in the spectral positions of the microdisk whispering gallery modes (WGMs) due to the expansion in the Pd lattice. H-2 concentrations below the flammable limit (4%) down to 0.3% could be detected in nitrogen atmosphere at room temperature. For H-2 concentrations between 0.3 1%, WGM spectral positions shifted linearly with H-2 concentration at a rate of 32 pm/%H-2. Average response time of the devices was measured to be 50 s for 1% H-2. The proposed device concept can also be used to detect different chemical gases by using appropriate sensing layers.eninfo:eu-repo/semantics/closedAccessMicrodisk resonatorSU-8 polymerhydrogen sensingwaveguide couplingConference Object934310.1117/12.20782442-s2.0-84931305991N/AWOS:000353695900007N/A