Seyhan A.Altan T.Ecer O.C.Zan R.2019-08-012019-08-0120171742-6588https://dx.doi.org/10.1088/1742-6596/902/1/012024https://hdl.handle.net/11480/1776Electron Microscopy and Analysis Group Conference 2017, EMAG 2017 -- 3 July 2017 through 6 July 2017 -- -- 131297Heterojunction solar cells composed of hydrogenated amorphous silicon (a-Si:H) and c-Si has been widely studied due to its excellent photovoltaic characteristics. In this study, we studied the structural and optical properties of a-Si:H thin films for heterojunction solar cells by using SEM, TEM and ellipsometry. We found that uniform deposition of a-Si:H thin film on substrate is crucial to reach high solar cell efficiencies. © Published under licence by IOP Publishing Ltd.eninfo:eu-repo/semantics/openAccessConference Object902110.1088/1742-6596/902/1/0120242-s2.0-85033681097N/AWOS:000416370700024N/A