Optical, Electrical and Structural Properties of ITO/IZO and IZO/ITO Multilayer Transparent Conductive Oxide Films Deposited via Radiofrequency Magnetron Sputtering

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dc.authoridKARTAL, EMRE/0000-0002-8602-2512
dc.authoridSeyhan, Ayse/0000-0001-8090-1404
dc.contributor.authorSeyhan, Ayse
dc.contributor.authorKartal, Emre
dc.date.accessioned2024-11-07T13:24:29Z
dc.date.available2024-11-07T13:24:29Z
dc.date.issued2023
dc.departmentNiğde Ömer Halisdemir Üniversitesi
dc.description.abstractIn this study, we investigated the potential of multilayer TCO structures, specifically those made up of Indium Tin Oxide (ITO) and Indium Zinc Oxide (IZO), for crystalline silicon heterojunction solar cells (SHJ). We used the radiofrequency (RF) magnetron sputtering method to deposit various thin-film structures under various deposition temperatures and evaluated their electrical, optical, and morphological properties. The objective was to obtain films with lower sheet resistances and higher transmittances than those of single-layer thin films. Our results show that the ITO/IZO/ITO/IZO/ITO multilayer film structure deposited at 200 degrees C achieves the best sheet resistance of 18.5 Ohm/sq and a high optical transmittance of over 90% at a 550 nm wavelength. This indicates that multilayer TCO structures have the potential to be more optically and electrically efficient, and that they can improve the performance of optoelectronic devices. Finally, a power conversion efficiency of 17.46% was obtained for a silicon heterojunction (SHJ) solar cell fabricated using an ITO/IZO/ITO/IZO/ITO multilayer film structure deposited at 200 degrees C as a front TCO. Our study provides valuable insights into the field of TCOs and offers a promising avenue for future research.
dc.identifier.doi10.3390/coatings13101719
dc.identifier.issn2079-6412
dc.identifier.issue10
dc.identifier.scopus2-s2.0-85175007792
dc.identifier.scopusqualityQ2
dc.identifier.urihttps://doi.org/10.3390/coatings13101719
dc.identifier.urihttps://hdl.handle.net/11480/14145
dc.identifier.volume13
dc.identifier.wosWOS:001094190600001
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherMdpi
dc.relation.ispartofCoatings
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.snmzKA_20241106
dc.subjecttransparent conductive oxide (TCO)
dc.subjectindium tin oxide (ITO)
dc.subjectindium zinc oxide (IZO)
dc.subjectmultilayer structures
dc.subjectradiofrequency (RF) magnetron sputtering
dc.subjectsheet resistance
dc.subjectoptical transmittance
dc.subjectthin films
dc.subjectsilicon heterojunction (SHJ) solar cell
dc.titleOptical, Electrical and Structural Properties of ITO/IZO and IZO/ITO Multilayer Transparent Conductive Oxide Films Deposited via Radiofrequency Magnetron Sputtering
dc.typeArticle

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