Hydrogen and humidity sensing based on WGMs of elastic polymer optical microresonators

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dc.contributor.authorEryürek M.
dc.contributor.authorKaradag Y.
dc.contributor.authorAnand S.
dc.contributor.authorKilinç N.
dc.contributor.authorKiraz A.
dc.date.accessioned2019-08-01T13:38:39Z
dc.date.available2019-08-01T13:38:39Z
dc.date.issued2015
dc.departmentNiğde ÖHÜ
dc.descriptionBrno University of Technology, Faculty of Electrical Engineering and Communication, Department of Theoretical and Experimental Electrical Engineering;Brno University of Technology, SIX - Research Centre of Sensor, Information and Communication System;Czech Technical University in Prague, Faculty of Biomedical Engineering (FBME), Department of Biomedical Technique;Czech Technical University in Prague, Faculty of Electrical Engineering (FEE), Department of EM Field;EMBS Chapter of the IEEE Czechoslovakia Section;et al.
dc.description.abstractWe report hydrogen and humidity sensor employing elastic polymer (SU-8) optical microresonators. The sensing mechanism relies on the optical whispering gallery mode (WGM) resonance shifts in the transmission spectra of these microresonators. WGMs are excited through SU-8 waveguides in which a tunable laser light is coupled from an optical fiber. Relative humidity between 0 and 65% is detected at room temperature. For hydrogen sensing, the microresonators are coated with a thin layer of palladium (Pd) metal layer to increase the sensing performance. Hydrogen gas is detected reversibly between 0.3 and 1.5%. Hydrogen gas concentrations higher than 1.5% result irreversible degradation of the devices because of a phase transition occurring in the Pd layer.
dc.identifier.endpage895
dc.identifier.isbn9.78193E+12
dc.identifier.issn1559-9450
dc.identifier.scopus2-s2.0-84947296790
dc.identifier.scopusqualityN/A
dc.identifier.startpage892
dc.identifier.urihttps://hdl.handle.net/11480/1952
dc.identifier.volume2015-January
dc.indekslendigikaynakScopus
dc.institutionauthor[0-Belirlenecek]
dc.language.isoen
dc.publisherElectromagnetics Academy
dc.relation.ispartofProgress in Electromagnetics Research Symposium
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.titleHydrogen and humidity sensing based on WGMs of elastic polymer optical microresonators
dc.typeConference Object

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