Integrated humidity sensor based on SU-8 polymer microdisk microresonator

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dc.authorid0000-0001-7977-1286
dc.authorid0000-0002-3092-5632
dc.authorid0000-0001-7977-1286
dc.authorid0000-0002-3092-5632
dc.authorid0000-0001-5931-8134
dc.authorid0000-0003-2123-2938
dc.contributor.authorEryurek, M.
dc.contributor.authorTasdemir, Z.
dc.contributor.authorKaradag, Y.
dc.contributor.authorAnand, S.
dc.contributor.authorKilinc, N.
dc.contributor.authorAlaca, B. E.
dc.contributor.authorKiraz, A.
dc.date.accessioned2019-08-01T13:38:39Z
dc.date.available2019-08-01T13:38:39Z
dc.date.issued2017
dc.departmentNiğde ÖHÜ
dc.description.abstractDue to its high interaction with water vapor and photolithographic patterning property, SU-8 is a favorable hygroscopic polymer for developing humidity sensors. In addition, optical resonances of optical microresonators are very sensitive to the dianges in their environment. Here, we present integrated optical humidity sensors based on chips containing SU-8 polymer microdisks and waveguides fabricated by single-step UV photolithography. The performance of these sensors is tested under a wide range of relative humidity (RH) levels (0-50%). A tunable laser light is coupled from an excitation fiber to individual SU-8 waveguides using end-face coupling method. As the laser wavelength is scanned, the whispering gallery modes (WGMs) are revealed as dips in the transmission spectra. Sensing is achieved by recording spectral shifts of the WGMs of the microdisk microresonators. Red shift is observed in the WGMs with increasing RH. Between 0 and 1% RH, an average spectral shift sensitivity of 108 pm/% RH is demonstrated from measurements performed on 4 sensor devices. This sensitivity is comparable to the highest values obtained using microresonators in the literature. Measurements performed with another sensor device revealed a decrease in sensitivity by only around 3 times when RH is increased to 45-50%. Finite element modeling simulations are carried out to determine the dominant effect responsible for the resonance shift. The results show that the refractive index change is more important than the microresonator size change. The standard deviation in wavelength measurement is <3 pm, indicating a limit of detection better than 0.03% RH. These results suggest that optical sensor devices that contain integrated SU-8 microresonators and waveguides can be employed as easy-to-fabricate and sensitive humidity sensors. (C) 2016 Elsevier B.V. All rights reserved.
dc.description.sponsorshipTUBITAK [110T803, 115F446]
dc.description.sponsorshipWe acknowledge financial support from TUBITAK (grant no. 110T803 and 115F446) and thank Alexandr Jonas for proofreading the manuscript.
dc.identifier.doi10.1016/j.snb.2016.09.136
dc.identifier.endpage1120
dc.identifier.issn0925-4005
dc.identifier.scopus2-s2.0-85011371500
dc.identifier.scopusqualityQ1
dc.identifier.startpage1115
dc.identifier.urihttps://dx.doi.org/10.1016/j.snb.2016.09.136
dc.identifier.urihttps://hdl.handle.net/11480/3506
dc.identifier.volume242
dc.identifier.wosWOS:000393267700137
dc.identifier.wosqualityQ1
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.institutionauthor[0-Belirlenecek]
dc.language.isoen
dc.publisherELSEVIER SCIENCE SA
dc.relation.ispartofSENSORS AND ACTUATORS B-CHEMICAL
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectMicrodisk
dc.subjectWhispering gallery mode
dc.subjectSU-8
dc.subjectFEM
dc.subjecthumidity sensor
dc.subjectmicroresonator
dc.titleIntegrated humidity sensor based on SU-8 polymer microdisk microresonator
dc.typeArticle

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