Patterning of photoresist by micro-holes with controllable physical dimensions via maskless photolithography

Küçük Resim Yok

Tarih

2023

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

Natl Inst Optoelectronics

Erişim Hakkı

info:eu-repo/semantics/closedAccess

Özet

Patterning of positive photoresist, coated on glass, with micro-holes via maskless photolithography was the subject of this study. The successful formation of micro-holes with controllable physical parameters on the homogenous photoresist was confirmed by optical microscope and profilometer measurements. Mainly, the effect of modulation and velocity of the laser on the spacing and diameter of micro-holes has been investigated. The comparison of the spacing-to-diameter (s/d) ratio calculated from the pattern with the smallest diameter and highest spacing to the one with the highest diameter and smallest spacing gives the result of 18-fold. For the pattern with the s/d ratio obtained by the lowest modulation and highest velocity, the circular shaped and well-defined micro-holes with 500 nm thickness, 10 mu m diameter and varying spacing from 15 (bottom) to 30 mu m (top) could be obtained successfully.

Açıklama

Anahtar Kelimeler

Maskless photolithography, Positive photoresist, Patterning, Micro-holes, UV-laser

Kaynak

Optoelectronics and Advanced Materials-Rapid Communications

WoS Q Değeri

Q4

Scopus Q Değeri

Q4

Cilt

17

Sayı

5-6

Künye