Pd thin films on flexible substrate for hydrogen sensor
Küçük Resim Yok
Tarih
2016
Yazarlar
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
ELSEVIER SCIENCE SA
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
In this work, palladium (Pd) thin films were prepared via RF sputtering method with various thicknesses (6 nm, 20 nm and 60 nm) on both a flexible substrate and a hard substrate. Hydrogen (H-2) sensing properties of Pd films on flexible substrate have been investigated depending on temperatures (25-100 degrees C) and H-2 concentrations (600 ppm - 10%). The effect of H-2 on structural properties of the films was also studied. The films were characterized by Scanning Electron Microscopy (SEM) and X-ray diffraction. It is found that whole Pd films on hard substrate show permanent structural deformation after exposed to 10% H-2 for 30 min. But, this H-2 exposure does not causes any structural deformation for 6 nm Pd film on flexible substrate and 6 nm Pd film on flexible substrate shows reversible sensor response up to 10% H-2 concentration without any structural deformation. On the other hand, Pd film sensors that have the thicknesses 20 nm and 60 nm on flexible substrate are irreversible for higher H-2 concentration (>2%) with film deformation. The sensor response of 6 nm Pd film on flexible substrate increased with increasing H-2 concentration up 4% and then saturated. The sensitivity of the film decreased with increasing operation temperature. (C) 2016 Elsevier B.V. All rights reserved.
Açıklama
Anahtar Kelimeler
Palladium, Thin film, Resistive hydrogen sensor, Gas sensor
Kaynak
JOURNAL OF ALLOYS AND COMPOUNDS
WoS Q Değeri
Q1
Scopus Q Değeri
Q1
Cilt
674
