Pd thin films on flexible substrate for hydrogen sensor

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dc.authorid0000-0002-4851-3062
dc.authorid0000-0003-2123-2938
dc.contributor.authorOzturk, Sadullah
dc.contributor.authorKilinc, Necmettin
dc.date.accessioned2019-08-01T13:38:39Z
dc.date.available2019-08-01T13:38:39Z
dc.date.issued2016
dc.departmentNiğde ÖHÜ
dc.description.abstractIn this work, palladium (Pd) thin films were prepared via RF sputtering method with various thicknesses (6 nm, 20 nm and 60 nm) on both a flexible substrate and a hard substrate. Hydrogen (H-2) sensing properties of Pd films on flexible substrate have been investigated depending on temperatures (25-100 degrees C) and H-2 concentrations (600 ppm - 10%). The effect of H-2 on structural properties of the films was also studied. The films were characterized by Scanning Electron Microscopy (SEM) and X-ray diffraction. It is found that whole Pd films on hard substrate show permanent structural deformation after exposed to 10% H-2 for 30 min. But, this H-2 exposure does not causes any structural deformation for 6 nm Pd film on flexible substrate and 6 nm Pd film on flexible substrate shows reversible sensor response up to 10% H-2 concentration without any structural deformation. On the other hand, Pd film sensors that have the thicknesses 20 nm and 60 nm on flexible substrate are irreversible for higher H-2 concentration (>2%) with film deformation. The sensor response of 6 nm Pd film on flexible substrate increased with increasing H-2 concentration up 4% and then saturated. The sensitivity of the film decreased with increasing operation temperature. (C) 2016 Elsevier B.V. All rights reserved.
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) [114M853]
dc.description.sponsorshipThis study was supported by The Scientific and Technological Research Council of Turkey (TUBITAK) with project number of 114M853.
dc.identifier.doi10.1016/j.jallcom.2016.03.042
dc.identifier.endpage184
dc.identifier.issn0925-8388
dc.identifier.issn1873-4669
dc.identifier.scopus2-s2.0-85009175925
dc.identifier.scopusqualityQ1
dc.identifier.startpage179
dc.identifier.urihttps://dx.doi.org/10.1016/j.jallcom.2016.03.042
dc.identifier.urihttps://hdl.handle.net/11480/3600
dc.identifier.volume674
dc.identifier.wosWOS:000373612500026
dc.identifier.wosqualityQ1
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.institutionauthor[0-Belirlenecek]
dc.language.isoen
dc.publisherELSEVIER SCIENCE SA
dc.relation.ispartofJOURNAL OF ALLOYS AND COMPOUNDS
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectPalladium
dc.subjectThin film
dc.subjectResistive hydrogen sensor
dc.subjectGas sensor
dc.titlePd thin films on flexible substrate for hydrogen sensor
dc.typeArticle

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