Sputtered platinum thin films for resistive hydrogen sensor application
Küçük Resim Yok
Tarih
2016
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
ELSEVIER SCIENCE BV
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
This work presents hydrogen (H-2) sensing properties of platinum (Pt) thin film deposited on glass substrate by sputter technique. The Pt thin films with different thickness prepared using RF sputtering method were characterized by the XRD, SEM and XPS techniques. Temperature dependent resistances and the gas measurements of the Pt thin films were investigated under a dry air flow at a temperature range from 30 degrees C to 200 degrees C. The H-2 sensing properties of Pt thin film sensors were also examined in the concentration range of 0.1-1% H-2. The results revealed that the Pt thin film with 2 nm thickness exhibited the best sensing performance to H-2 at 30 degrees C under dry air flow. (C) 2016 Elsevier B.V. All rights reserved.
Açıklama
Anahtar Kelimeler
Platinum, Thin Film, Hydrogen sensor, Resistive sensor, Sputtering
Kaynak
MATERIALS LETTERS
WoS Q Değeri
Q2
Scopus Q Değeri
Q2
Cilt
177
