Sputtered platinum thin films for resistive hydrogen sensor application

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dc.authorid0000-0003-2123-2938
dc.contributor.authorSennik, Erdem
dc.contributor.authorUrdem, Seyma
dc.contributor.authorErkovan, Mustafa
dc.contributor.authorKilinc, Necmettin
dc.date.accessioned2019-08-01T13:38:39Z
dc.date.available2019-08-01T13:38:39Z
dc.date.issued2016
dc.departmentNiğde ÖHÜ
dc.description.abstractThis work presents hydrogen (H-2) sensing properties of platinum (Pt) thin film deposited on glass substrate by sputter technique. The Pt thin films with different thickness prepared using RF sputtering method were characterized by the XRD, SEM and XPS techniques. Temperature dependent resistances and the gas measurements of the Pt thin films were investigated under a dry air flow at a temperature range from 30 degrees C to 200 degrees C. The H-2 sensing properties of Pt thin film sensors were also examined in the concentration range of 0.1-1% H-2. The results revealed that the Pt thin film with 2 nm thickness exhibited the best sensing performance to H-2 at 30 degrees C under dry air flow. (C) 2016 Elsevier B.V. All rights reserved.
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) [114M853]
dc.description.sponsorshipThis study was supported by The Scientific and Technological Research Council of Turkey (TUBITAK) with project number of 114M853.
dc.identifier.doi10.1016/j.matlet.2016.04.134
dc.identifier.endpage107
dc.identifier.issn0167-577X
dc.identifier.issn1873-4979
dc.identifier.scopus2-s2.0-84964669901
dc.identifier.scopusqualityQ2
dc.identifier.startpage104
dc.identifier.urihttps://dx.doi.org/10.1016/j.matlet.2016.04.134
dc.identifier.urihttps://hdl.handle.net/11480/3588
dc.identifier.volume177
dc.identifier.wosWOS:000376532200026
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.institutionauthor[0-Belirlenecek]
dc.language.isoen
dc.publisherELSEVIER SCIENCE BV
dc.relation.ispartofMATERIALS LETTERS
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectPlatinum
dc.subjectThin Film
dc.subjectHydrogen sensor
dc.subjectResistive sensor
dc.subjectSputtering
dc.titleSputtered platinum thin films for resistive hydrogen sensor application
dc.typeArticle

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