Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target
Küçük Resim Yok
Tarih
2023
Yazarlar
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Erişim Hakkı
info:eu-repo/semantics/openAccess
Özet
In this study, Copper Indium Gallium Selenide (CIGS) thin films were successfully sputtered from a single quaternary target onto soda lime glass substrates. The effect of the incident angle of target atoms and sputter temperature on the properties of the films were examined using various techniques. It was found that a higher incident angle of target atoms resulted in a columnar microstructure, while a lower angle produced a solid film. The columnar structure showed improved optical absorption compared to the solid film. The sputter temperature had a greater effect on the crystalline properties of the films, with all films except those sputtered at room temperature showing polycrystalline formation. The films displayed a chalcopyrite structure and acceptable band gaps in the range of 1.1-1.3 eV, regardless of the incident angle and sputter temperature. These results indicate that the optical properties of CIGS thin films can be improved by a small increase in the incident angle of target atoms, without adversely affecting the structural and crystalline properties.
Açıklama
Anahtar Kelimeler
Nanobilim ve Nanoteknoloji, RF magnetron sputtering, substrate temperature, CIGS thin film, oblique angle, columnar structure
Kaynak
Cumhuriyet Science Journal
WoS Q Değeri
Scopus Q Değeri
Cilt
44
Sayı
2
