Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target

dc.contributor.authorKeles, Filiz
dc.contributor.authorGüçlüer, Furkan
dc.date.accessioned2024-11-07T13:16:04Z
dc.date.available2024-11-07T13:16:04Z
dc.date.issued2023
dc.departmentNiğde Ömer Halisdemir Üniversitesi
dc.description.abstractIn this study, Copper Indium Gallium Selenide (CIGS) thin films were successfully sputtered from a single quaternary target onto soda lime glass substrates. The effect of the incident angle of target atoms and sputter temperature on the properties of the films were examined using various techniques. It was found that a higher incident angle of target atoms resulted in a columnar microstructure, while a lower angle produced a solid film. The columnar structure showed improved optical absorption compared to the solid film. The sputter temperature had a greater effect on the crystalline properties of the films, with all films except those sputtered at room temperature showing polycrystalline formation. The films displayed a chalcopyrite structure and acceptable band gaps in the range of 1.1-1.3 eV, regardless of the incident angle and sputter temperature. These results indicate that the optical properties of CIGS thin films can be improved by a small increase in the incident angle of target atoms, without adversely affecting the structural and crystalline properties.
dc.identifier.doi10.17776/csj.1242731
dc.identifier.endpage402
dc.identifier.issn2587-2680
dc.identifier.issn2587-246X
dc.identifier.issue2
dc.identifier.startpage396
dc.identifier.trdizinid1186315
dc.identifier.urihttps://doi.org/10.17776/csj.1242731
dc.identifier.urihttps://search.trdizin.gov.tr/tr/yayin/detay/1186315
dc.identifier.urihttps://hdl.handle.net/11480/12046
dc.identifier.volume44
dc.indekslendigikaynakTR-Dizin
dc.language.isoen
dc.relation.ispartofCumhuriyet Science Journal
dc.relation.publicationcategoryMakale - Ulusal Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.snmzKA_20241107
dc.subjectNanobilim ve Nanoteknoloji
dc.subjectRF magnetron sputtering
dc.subjectsubstrate temperature
dc.subjectCIGS thin film
dc.subjectoblique angle
dc.subjectcolumnar structure
dc.titleInfluence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target
dc.typeArticle

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