Synthesis of MoS2 thin films using the two-step approach

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dc.contributor.authorErkan, Serkan
dc.contributor.authorAltuntepe, Ali
dc.contributor.authorZan, Recep
dc.date.accessioned2024-11-07T13:16:42Z
dc.date.available2024-11-07T13:16:42Z
dc.date.issued2023
dc.departmentNiğde Ömer Halisdemir Üniversitesi
dc.description.abstractIn this study, MoS2 thin films were grown using two-step approach, which is based on employing both PVD and CVD techniques. The films were obtained initially by sputtering 1nm Mo film in the PVD system and followed by sulphurization of the film in CVD at 700oC. The grown films were optimized employing different sulphurization times. The main difference in our study from the current literature is using preheated CVD furnace (700oC) ahead of sulphurization. The films quality are then investigated using Raman and Photoluminance spectrometer as well as AFM measurements. The Raman spectrums indicate that two characteristic vibration modes of 2H-MoS2 phase were observed in all samples, however, vibration modes of 1T-MoS2 phase were also observed in some films at low sulphurization time. These results were also in line with PL measurements that confirm the direct band transition of the MoS2 films. The surface topography of the films were investigated by AFM for MoS2 films obtained by the sulfurization of 1 nm-thick Mo film in 15 minutes at 700oC which shows MoS2 crystals in triangle shape.
dc.identifier.doi10.28948/ngmuh.1184705
dc.identifier.endpage301
dc.identifier.issn2564-6605
dc.identifier.issue1
dc.identifier.startpage297
dc.identifier.trdizinid1152637
dc.identifier.urihttps://doi.org/10.28948/ngmuh.1184705
dc.identifier.urihttps://search.trdizin.gov.tr/tr/yayin/detay/1152637
dc.identifier.urihttps://hdl.handle.net/11480/12510
dc.identifier.volume12
dc.indekslendigikaynakTR-Dizin
dc.language.isoen
dc.relation.ispartofNiğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi
dc.relation.publicationcategoryMakale - Ulusal Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.snmzKA_20241107
dc.subjectNanobilim ve Nanoteknoloji
dc.subjectPVD
dc.subjectMoS2
dc.subjectTwo-dimensional materials
dc.subjectCVD
dc.subjectRaman spectroscopy
dc.titleSynthesis of MoS2 thin films using the two-step approach
dc.typeArticle

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